Displacement amplification and piezo-sensing in differentially piezo-driven nanopositioners
- Creator: Bazaei, Ali
- Resource Type: thesis
- Date: 2022
Feedback Control Strategy for a High Speed Differential Piezo-Driven Stage by an Exclusive use of Piezoelectric Sensors
- Creator: Leiro, Freddy Romero , Bazaei, Ali , Regnier, Stephane , Boudaoud, Mokrane
- Resource Type: conference paper
- Date: 2022
Piezo displacement sensors for a compact high-speed x–y nanopositioner in differential actuation mode
- Creator: Bazaei, Ali , Boudaoud, Mokrane , Ettefagh, Massoud Hemmasian , Chen, Zhiyong , Regnier, Stephane
- Resource Type: journal article
- Date: 2022
Displacement amplification and differential actuation in piezo driven nanopositioners
- Creator: Bazaei, Ali , Ettefagh, Massoud Hemmasian , Chen, Zhiyong
- Resource Type: journal article
- Date: 2021
Non-collocated displacement sensing by semiconductor strain gauges in differentially piezo-driven nanopositioners
- Creator: Bazaei, Ali , Boudaoud, Mokrane , Ettefagh, Massoud Hemmasian , Chen, Zhiyong , Regnier, Stephane
- Resource Type: journal article
- Date: 2021